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Fabrication and reliability testing of Ti/TiN heaters

dc.contributor.authorDe Moor, Piet
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSimons, Veerle
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-06T10:56:43Z
dc.date.available2021-10-06T10:56:43Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3367
dc.sourceIIOimport
dc.titleFabrication and reliability testing of Ti/TiN heaters
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage284
dc.source.endpage293
dc.source.conferenceMicromachining and Microfabrication Process Technology V
dc.source.conferencedate20/09/1999
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3874


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