Show simple item record

Selective etches for gate-all-around (GAA) device integration: opportunities and challenges

dc.contributor.authorOniki, Yusuke
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-27T15:02:42Z
dc.date.available2021-10-27T15:02:42Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33696
dc.sourceIIOimport
dc.titleSelective etches for gate-all-around (GAA) device integration: opportunities and challenges
dc.typeMeeting abstract
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.source.peerreviewyes
dc.source.beginpage1092
dc.source.conference16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
dc.source.conferencedate13/10/2019
dc.source.conferencelocationAtlanta, GA USA
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2019-02/23/1092.abstract
imec.availabilityPublished - imec
imec.internalnotesECS Meeting Abstracts; Vol. MA2019-02


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record