Publication:
Selective etches for gate-all-around (GAA) device integration: opportunities and challenges
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Acq. date: 2026-10-13
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Acq. date: 2026-10-13
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1 since deposited on 2021-10-27
Acq. date: 2026-10-13
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2099 since deposited on 2021-10-27
33last month
7last week
Acq. date: 2026-10-13
Citations