Authors

Padovani, Andrea; Kaczer, Ben; Pesic, Milan; Belmonte, Attilio; Popovici, Mihaela Ioana; Nyns, Laura; Linten, Dimitri; Afanasiev, Valeri; Shlyakhov, Ilya; Lee, Younggon; Park, Hokyung; Larcher, Luca

ISSN

0018-9383

Issue

4

Journal

IEEE Transactions on Electron Devices

Volume

66

Title

A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

Publication type

Journal article

Embargo date

9999-12-31