A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

Padovani, Andrea; Kaczer, Ben; Pesic, Milan; Belmonte, Attilio; Popovici, Mihaela Ioana; Nyns, Laura; Linten, Dimitri; Afanasiev, Valeri; Shlyakhov, Ilya; Lee, Younggon; Park, Hokyung; Larcher, Luca

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A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

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2019

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Popovici, Mihaela Ioana

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IEEE Transactions on Electron Devices

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Acq. date: 2025-12-10

A sensitivity map-based approach to profile defects in MIM capacitors from I-V, C-V and G-V measurements

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