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Selective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration

dc.contributor.authorPorret, Clément
dc.contributor.authorHuang, Yan-Hua
dc.contributor.authorRengo, Gianluca
dc.contributor.authorYu, Hao
dc.contributor.authorSchaekers, Marc
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorHeyns, Marc
dc.contributor.authorVohra, Anurag
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRosseel, Erik
dc.contributor.authorLanger, Robert
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-27T16:17:58Z
dc.date.available2021-10-27T16:17:58Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33819
dc.sourceIIOimport
dc.titleSelective epitaxial p-SiGe source-drain contacts: low contact resistivity (1.5x10-9 ohm.cm2) by optimizing strain and doping concentration
dc.typeProceedings paper
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorRengo, Gianluca
dc.contributor.imecauthorYu, Hao
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorVohra, Anurag
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecYu, Hao::0000-0002-1976-0259
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVohra, Anurag::0000-0002-2831-0719
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage601
dc.source.endpage602
dc.source.conferenceExtended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate2/09/2019
dc.source.conferencelocationNagoya Japan
dc.identifier.urlhttp://www.ssdm.jp/docs/SSDM2019_TechnicalProgram-All_Sep3-5.pdf?rev=20190827
imec.availabilityPublished - imec


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