First demonstration of MOVPE In1-xGaxAs macaroni channel for 3-D NAND memory devices

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Authors
Ramesh, Siva; Vadakupudhu Palayam, Senthil; Rosseel, Erik; Arreghini, Antonio; Kunert, Bernardette; Baryshnikova, Marina; Zhang, Liping; Ong, Patrick; Teugels, Lieve; Pak, Murat; Jossart, Nico; Raymaekers, Tom; Stiers, Jimmy; Van den Bosch, Geert; Furnemont, Arnaud
Conference
International Memory Workshop 2019
Title
First demonstration of MOVPE In1-xGaxAs macaroni channel for 3-D NAND memory devices
Publication type
Meeting abstract
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