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First demonstration of MOVPE In1-xGaxAs macaroni channel for 3-D NAND memory devices

dc.contributor.authorRamesh, Siva
dc.contributor.authorVadakupudhu Palayam, Senthil
dc.contributor.authorRosseel, Erik
dc.contributor.authorArreghini, Antonio
dc.contributor.authorKunert, Bernardette
dc.contributor.authorBaryshnikova, Marina
dc.contributor.authorZhang, Liping
dc.contributor.authorOng, Patrick
dc.contributor.authorTeugels, Lieve
dc.contributor.authorPak, Murat
dc.contributor.authorJossart, Nico
dc.contributor.authorRaymaekers, Tom
dc.contributor.authorStiers, Jimmy
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.date.accessioned2021-10-27T16:49:36Z
dc.date.available2021-10-27T16:49:36Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33868
dc.sourceIIOimport
dc.titleFirst demonstration of MOVPE In1-xGaxAs macaroni channel for 3-D NAND memory devices
dc.typeMeeting abstract
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorVadakupudhu Palayam, Senthil
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorBaryshnikova, Marina
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorPak, Murat
dc.contributor.imecauthorJossart, Nico
dc.contributor.imecauthorStiers, Jimmy
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecBaryshnikova, Marina::0000-0002-5945-4459
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.source.peerreviewyes
dc.source.beginpage87
dc.source.endpage90
dc.source.conferenceInternational Memory Workshop 2019
dc.source.conferencedate13/05/2019
dc.source.conferencelocationMonterey USA
imec.availabilityPublished - imec


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