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Simulation and design of an optical accelerometer

dc.contributor.authorRochus, Veronique
dc.contributor.authorWesterveld, Wouter
dc.contributor.authorFigeys, Bruno
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.date.accessioned2021-10-27T17:08:04Z
dc.date.available2021-10-27T17:08:04Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33896
dc.sourceIIOimport
dc.titleSimulation and design of an optical accelerometer
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage5
dc.source.conference20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
dc.source.conferencedate24/04/2019
dc.source.conferencelocationHannover Germany
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8724569
imec.availabilityPublished - open access


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