Enabling sub-5nm CMOS technology scaling thinner and taller!

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Authors
Ryckaert, Julien; Na, Myung Hee; Weckx, Pieter; Jang, Doyoung; Schuddinck, Pieter; Chehab, Bilal; Patli, Sudhir; Sarkar, Satadru; Zografos, Odysseas; Baert, Rogier; Verkest, Diederik
Conference
65th IEEE Annual International Electron Devices Meeting (IEDM)
Title
Enabling sub-5nm CMOS technology scaling thinner and taller!
Publication type
Proceedings paper
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