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Enabling sub-5nm CMOS technology scaling thinner and taller!
Publication:
Enabling sub-5nm CMOS technology scaling thinner and taller!
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Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ryckaert, Julien
;
Na, Myung Hee
;
Weckx, Pieter
;
Jang, Doyoung
;
Schuddinck, Pieter
;
Chehab, Bilal
;
Patli, Sudhir
;
Sarkar, Satadru
;
Zografos, Odysseas
;
Baert, Rogier
;
Verkest, Diederik
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1974
since deposited on 2021-10-27
Acq. date: 2025-12-18
Citations
Metrics
Views
1974
since deposited on 2021-10-27
Acq. date: 2025-12-18
Citations