Analysis of high voltage TDDB measurements on Ta2O5/SiO2 stack

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Authors
Degraeve, Robin; Kaczer, Ben; Houssa, Michel; Groeseneken, Guido; Heyns, Marc; Jeon, J. S.; Halliyal, A.
Conference
International Electron Devices Meeting. Technical digest; December 1999; Washington, D.C.
Title
Analysis of high voltage TDDB measurements on Ta2O5/SiO2 stack
Publication type
Proceedings paper
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