Device-based threading dislocation assessment in germanium hetero-epitaxy

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Authors
Simoen, Eddy; Hsu, Brent; Eneman, Geert; Rosseel, Erik; Loo, Roger; Arimura, Hiroaki; Horiguchi, Naoto; Claeys, Cor; Wen, Wei-Chen; Nakashima, Hiroshi; Oliveira, Alberto; Agopian, Paula G.D.; Martino, Joao
Conference
SBMICRO 2019
Title
Device-based threading dislocation assessment in germanium hetero-epitaxy
Publication type
Proceedings paper
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