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Device-based threading dislocation assessment in germanium hetero-epitaxy

dc.contributor.authorSimoen, Eddy
dc.contributor.authorHsu, Brent
dc.contributor.authorEneman, Geert
dc.contributor.authorRosseel, Erik
dc.contributor.authorLoo, Roger
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorClaeys, Cor
dc.contributor.authorWen, Wei-Chen
dc.contributor.authorNakashima, Hiroshi
dc.contributor.authorOliveira, Alberto
dc.contributor.authorAgopian, Paula G.D.
dc.contributor.authorMartino, Joao
dc.date.accessioned2021-10-27T18:20:51Z
dc.date.available2021-10-27T18:20:51Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34007
dc.sourceIIOimport
dc.titleDevice-based threading dislocation assessment in germanium hetero-epitaxy
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorHsu, Brent
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecHsu, Brent::0000-0003-0823-6088
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.conferenceSBMICRO 2019
dc.source.conferencedate26/08/2019
dc.source.conferencelocationSao Paolo Brazil
dc.identifier.urlhttp://www.psi.poli.usp.br/chipinsampa/invited-speakers/
imec.availabilityPublished - imec


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