Authors

Simoen, Eddy; O'Sullivan, Barry; Ritzenthaler, Romain; Dentoni Litta, Eugenio; Schram, Tom; Horiguchi, Naoto; Claeys, Cor

ISSN

0268-1242

Issue

1

Journal

Semiconductor Science and Technology

Volume

34

Title

Can we optimize the gate oxide quality of DRAM input/output pMOSFETs by a post-deposition treatment?

Publication type

Journal article

Embargo date

9999-12-31