dc.contributor.author | Sirbu, B. | |
dc.contributor.author | Eichhammer, Y. | |
dc.contributor.author | Oppermann, H. | |
dc.contributor.author | Tekin, T. | |
dc.contributor.author | Kraft, J. | |
dc.contributor.author | Sidorov, V. | |
dc.contributor.author | Yin, Xin | |
dc.contributor.author | Bauwelinck, Johan | |
dc.contributor.author | Neumeyr, C. | |
dc.contributor.author | Soares, F. | |
dc.date.accessioned | 2021-10-27T18:29:37Z | |
dc.date.available | 2021-10-27T18:29:37Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34020 | |
dc.source | IIOimport | |
dc.title | 3D silicon photonics interposer for Tb/s optical interconnects in data centers with double-side assembled active components and integrated optical and electrical through silicon via on SOI | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Yin, Xin | |
dc.contributor.imecauthor | Bauwelinck, Johan | |
dc.contributor.orcidimec | Yin, Xin::0000-0002-9672-6652 | |
dc.contributor.orcidimec | Bauwelinck, Johan::0000-0001-5254-2408 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1052 | |
dc.source.endpage | 1059 | |
dc.source.conference | IEEE 69th Electronic Components and Technology Conference - ECTC | |
dc.source.conferencedate | 25/05/2019 | |
dc.source.conferencelocation | Las Vegas USA | |
dc.identifier.url | https://ieeexplore.ieee.org/document/8811251 | |
imec.availability | Published - open access | |