Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contacted pitch and 250μA/μm drain current

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Authors
Smets, Quentin; Arutchelvan, Goutham; Jussot, Julien; Verreck, Devin; Asselberghs, Inge; Nalin Mehta, Ankit; Gaur, Abhinav; Lin, Dennis; El Kazzi, Salim; Groven, Benjamin; Caymax, Matty; Radu, Iuliana
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contacted pitch and 250μA/μm drain current
Publication type
Proceedings paper
Embargo date
9999-12-31
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