Show simple item record

Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns

dc.contributor.authorSoethoudt, Job
dc.contributor.authorGrillo, Fabio
dc.contributor.authorMarques, Esteban
dc.contributor.authorVan Ommen, Ruud
dc.contributor.authorBriggs, Basoene
dc.contributor.authorHody, Hubert
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorFranquet, Alexis
dc.contributor.authorChan, BT
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-27T18:43:24Z
dc.date.available2021-10-27T18:43:24Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34040
dc.sourceIIOimport
dc.titleDefect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
dc.typeOral presentation
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorMarques, Esteban
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conferenceALD 2019
dc.source.conferencedate21/07/2019
dc.source.conferencelocationBellevue USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record