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Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction

dc.contributor.authorSoethoudt, Job
dc.contributor.authorTomczak, Yoann
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-27T18:45:22Z
dc.date.available2021-10-27T18:45:22Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34043
dc.sourceIIOimport
dc.titleArea-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction
dc.typeMeeting abstract
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorTomczak, Yoann
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.source.peerreviewno
dc.source.conferenceEuroCVD 2019 / Baltic ALD 2019
dc.source.conferencedate24/06/2019
dc.source.conferencelocationLuxembourg Luxemburg
imec.availabilityPublished - imec


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