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FEOL patterning challenges in scaled SRAM with vertical Surrounding Gate Transistors (SGT)
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Authors
Tao, Zheng
;
Li, Waikin
;
Kim, Min-Soo
;
Devriendt, Katia
;
Lorant, Christophe
;
Sebaai, Farid
;
Porret, Clément
;
Rosseel, Erik
;
Sepulveda Marquez, Alfonso
;
Jourdan, Nicolas
;
Kikuchi, Yoshiaki
;
Boemmels, Juergen
;
Mitard, Jerome
;
Matagne, Philippe
;
Ragnarsson, Lars-Ake
;
Dangol, Anish
;
Batuk, Dmitry
;
Martinez Alanis, Gerardo Tadeo
;
Geypen, Jef
;
Altamirano Sanchez, Efrain
;
Lee, James
;
Li, YiSuo
;
Kanazawa, Kenichi
;
Harada, Nozomu
;
Masuoka, Fujio
Conference
DPS2019 (41st International symposium on Dry Process)
Title
FEOL patterning challenges in scaled SRAM with vertical Surrounding Gate Transistors (SGT)
Publication type
Meeting abstract
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