Authors

Thiam, Arame; Wan, Danny; Souriau, Laurent; Babaei Gavan, Khashayar; Rassoul, Nouredine; Swerts, Johan; Couet, Sebastien; Raymenants, Eline; Jussot, Julien; Trivkovic, Darko; Ercken, Monique; Wilson, Chris; Radu, Iuliana

Conference

Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019

Title

Patterning challenges for beyond 3nm logic devices: Example of an interconnected magnetic tunnel junction

Publication type

Proceedings paper