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Free-standing carbon nanotube films for extreme ultraviolet pellicle application

dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorMariano, Marina
dc.contributor.authorKorytov, Maxim
dc.contributor.authorLiebens, Maarten
dc.contributor.authorSchapmans, Elie
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorGallagher, Emily
dc.date.accessioned2021-10-27T19:41:54Z
dc.date.available2021-10-27T19:41:54Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34126
dc.sourceIIOimport
dc.titleFree-standing carbon nanotube films for extreme ultraviolet pellicle application
dc.typeProceedings paper
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorMariano, Marina
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorLiebens, Maarten
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.source.peerreviewno
dc.source.conferenceNT19: International Conference on the Science and Application of Nanotubes and Low-Dimensional Materials
dc.source.conferencedate21/07/2019
dc.source.conferencelocationWürzburg Germany
imec.availabilityPublished - imec


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