CoSi2 formation in the presence of interfacial silicon oxide

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Authors

Detavernier, C.; Van Meirhaeghe, R. L.; Cardon, F.; Donaton, R. A.; Maex, Karen

Issue

20

Journal

Appl. Phys. Lett.

Volume

74

Title

CoSi2 formation in the presence of interfacial silicon oxide

Publication type

Journal article

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