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The effect of pad structuring on CMP performance
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Authors
Devriendt, Katia
;
Vrancken, Evi
;
Grillaert, Joost
;
Meuris, Marc
;
Heylen, Nancy
;
Fyen, Wim
;
Heyns, Marc
;
Chung, A.
;
Hsu, O.
Conference
Proceedings of the 4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC
Title
The effect of pad structuring on CMP performance
Publication type
Proceedings paper
Embargo date
9999-12-31
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