First demonstration of III-V HBTs on 300mm Si substrates using nanoridge technology

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Authors
Vais, Abhitosh; Witters, Liesbeth; Mols, Yves; Sibaja-Hernandez, Arturo; Walke, Amey; Yu, Hao; Deshpande, Paru; Baryshnikova, Marina; Mannaert, Geert; Alcotte, Reynald; Ingels, Mark; Wambacq, Piet; Parvais, Bertrand; Langer, Robert; Kunert, Bernardette; Waldron, Niamh; Collaert, Nadine
Conference
2019 IEEE International Electron Devices Meeting - IEDM
Title
First demonstration of III-V HBTs on 300mm Si substrates using nanoridge technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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