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First demonstration of III-V HBTs on 300mm Si substrates using nanoridge technology

dc.contributor.authorVais, Abhitosh
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMols, Yves
dc.contributor.authorSibaja-Hernandez, Arturo
dc.contributor.authorWalke, Amey
dc.contributor.authorYu, Hao
dc.contributor.authorDeshpande, Paru
dc.contributor.authorBaryshnikova, Marina
dc.contributor.authorMannaert, Geert
dc.contributor.authorAlcotte, Reynald
dc.contributor.authorIngels, Mark
dc.contributor.authorWambacq, Piet
dc.contributor.authorParvais, Bertrand
dc.contributor.authorLanger, Robert
dc.contributor.authorKunert, Bernardette
dc.contributor.authorWaldron, Niamh
dc.contributor.authorCollaert, Nadine
dc.date.accessioned2021-10-27T20:12:57Z
dc.date.available2021-10-27T20:12:57Z
dc.date.issued2019-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34171
dc.sourceIIOimport
dc.titleFirst demonstration of III-V HBTs on 300mm Si substrates using nanoridge technology
dc.typeProceedings paper
dc.contributor.imecauthorVais, Abhitosh
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMols, Yves
dc.contributor.imecauthorSibaja-Hernandez, Arturo
dc.contributor.imecauthorWalke, Amey
dc.contributor.imecauthorYu, Hao
dc.contributor.imecauthorDeshpande, Paru
dc.contributor.imecauthorBaryshnikova, Marina
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorAlcotte, Reynald
dc.contributor.imecauthorIngels, Mark
dc.contributor.imecauthorWambacq, Piet
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorLanger, Robert
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorWaldron, Niamh
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.orcidimecVais, Abhitosh::0000-0002-0317-7720
dc.contributor.orcidimecYu, Hao::0000-0002-1976-0259
dc.contributor.orcidimecDeshpande, Paru::0000-0002-9693-5761
dc.contributor.orcidimecBaryshnikova, Marina::0000-0002-5945-4459
dc.contributor.orcidimecIngels, Mark::0000-0003-1939-2422
dc.contributor.orcidimecWambacq, Piet::0000-0003-4388-7257
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecLanger, Robert::0000-0002-1132-3468
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage178
dc.source.endpage18
dc.source.conference2019 IEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate7/11/2019
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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