dc.contributor.author | Devriendt, Katia | |
dc.contributor.author | Vrancken, Evi | |
dc.contributor.author | Grillaert, Joost | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Fyen, Wim | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Chung, A. | |
dc.contributor.author | Hsu, O. | |
dc.date.accessioned | 2021-10-06T11:04:11Z | |
dc.date.available | 2021-10-06T11:04:11Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3417 | |
dc.source | IIOimport | |
dc.title | The effect of pad structuring on CMP performance | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Devriendt, Katia | |
dc.contributor.imecauthor | Vrancken, Evi | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 227 | |
dc.source.conference | Proceedings of the 4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC | |
dc.source.conferencedate | 10/02/1999 | |
dc.source.conferencelocation | Santa Clara, CA USA | |
imec.availability | Published - open access | |