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Metastable and stable transistion-metal silicide layer formation in Si and SiGe
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Authors
Dézsi, I.
;
Fetzer, C.
;
Bill, E.
;
Caymax, Matty
;
Pattyn, Hugo
;
Degroote, Sven
;
Langouche, G.
;
Vantomme, Andre
Conference
International Conference on the Application of the Mössbauer Effect; August 1999; Garmisch-Partenkirchen.
Title
Metastable and stable transistion-metal silicide layer formation in Si and SiGe
Publication type
Oral presentation
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