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Co and Ru dual damascene compatible metallization studies

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorHeylen, Nancy
dc.contributor.authorLariviere, Stephane
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorTeugels, Lieve
dc.contributor.authorChew, Soon Aik
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorHung, Joey
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVanstreels, Kris
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorStruyf, Herbert
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-27T20:38:52Z
dc.date.available2021-10-27T20:38:52Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34208
dc.sourceIIOimport
dc.titleCo and Ru dual damascene compatible metallization studies
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorLariviere, Stephane
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorChew, Soon Aik
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorHung, Joey
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecChew, Soon Aik::0000-0003-3013-4846
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewyes
dc.source.beginpage2.2
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttp://www.iitc-conference.org/technical-program-abstracts.html#
imec.availabilityPublished - imec


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