Authors

Donaton, R. A.; Coenegrachts, Bart; Maex, Karen; Struyf, Herbert; Vanhaelemeersch, Serge; Beyer, Gerald; Richard, Emmanuel; Vervoort, Iwan; Fyen, Wim; Grillaert, Joost; van der Groen, Sonja; Stucchi, Michele; De Roest, David

Conference

Proceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA.

Title

Critical issues in the integration of Copper and low-k dielectrics

Publication type

Proceedings paper