Show simple item record

21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization

dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorWilson, Chris
dc.contributor.authorPaolillo, Sara
dc.contributor.authorDecoster, Stefan
dc.contributor.authorMao, Ming
dc.contributor.authorVersluijs, Janko
dc.contributor.authorBlanco, Victor
dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorLorant, Christophe
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorHeylen, Nancy
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorWebers, Tomas
dc.contributor.authorVats, Hemant
dc.contributor.authorRynders, Luc
dc.contributor.authorCupak, Miroslav
dc.contributor.authorLee, Jae Uk
dc.contributor.authorDrissi, Youssef
dc.contributor.authorHalipre, Luc
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorWitters, Thomas
dc.contributor.authorVan Gompel, Sander
dc.contributor.authorKimura, Yosuke
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorCiofi, Ivan
dc.contributor.authorContino, Antonino
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorLariviere, Stephane
dc.contributor.authorDe Wachter, Bart
dc.contributor.authorVancoille, Eric
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorErcken, Monique
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorCroes, Kristof
dc.contributor.authorLeray, Philippe
dc.contributor.authorPardons, Katrien
dc.contributor.authorBarla, Kathy
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-27T22:12:27Z
dc.date.available2021-10-27T22:12:27Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34338
dc.sourceIIOimport
dc.title21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
dc.typeProceedings paper
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorMao, Ming
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorWebers, Tomas
dc.contributor.imecauthorVats, Hemant
dc.contributor.imecauthorRynders, Luc
dc.contributor.imecauthorCupak, Miroslav
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.imecauthorDrissi, Youssef
dc.contributor.imecauthorHalipre, Luc
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorVan Gompel, Sander
dc.contributor.imecauthorKimura, Yosuke
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorLariviere, Stephane
dc.contributor.imecauthorDe Wachter, Bart
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorPardons, Katrien
dc.contributor.imecauthorBarla, Kathy
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpage3.4
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttps://iitc-conference.org/2019-iitc-mam-program/
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record