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Vertical nanowire and nanosheet FETs: device features, novel schemes for improved process control and enhanced mobility, potential for faster & more energy efficient circuits

dc.contributor.authorVeloso, Anabela
dc.contributor.authorEneman, Geert
dc.contributor.authorHuynh-Bao, Trong
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVecchio, Emma
dc.contributor.authorDevriendt, Katia
dc.contributor.authorBrus, Stephan
dc.contributor.authorRosseel, Erik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorChan, BT
dc.contributor.authorRadisic, Dunja
dc.contributor.authorLi, Waikin
dc.contributor.authorVersluijs, Janko
dc.contributor.authorTeugels, Lieve
dc.contributor.authorSebaai, Farid
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorVancoille, Eric
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorMatagne, Philippe
dc.date.accessioned2021-10-27T22:16:44Z
dc.date.available2021-10-27T22:16:44Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34343
dc.sourceIIOimport
dc.titleVertical nanowire and nanosheet FETs: device features, novel schemes for improved process control and enhanced mobility, potential for faster & more energy efficient circuits
dc.typeProceedings paper
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorLi, Waikin
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecBrus, Stephan::0000-0003-3554-0640
dc.source.peerreviewyes
dc.source.conferenceInternational Electron Devices Meeting - IEDM 2019
dc.source.conferencedate7/12/2019
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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