Authors

Veloso, Anabela; Eneman, Geert; Huynh-Bao, Trong; Vaisman Chasin, Adrian; Simoen, Eddy; Vecchio, Emma; Devriendt, Katia; Brus, Stephan; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Paraschiv, Vasile; Chan, BT; Radisic, Dunja; Li, Waikin; Versluijs, Janko; Teugels, Lieve; Sebaai, Farid; Favia, Paola; Bender, Hugo; Vancoille, Eric; Scheerder, Jeroen; Fleischmann, Claudia; Horiguchi, Naoto; Matagne, Philippe

Conference

International Electron Devices Meeting - IEDM 2019

Title

Vertical nanowire and nanosheet FETs: device features, novel schemes for improved process control and enhanced mobility, potential for faster & more energy efficient circuits

Publication type

Proceedings paper