Browsing by author "Vancoille, Eric"
Now showing items 1-20 of 31
-
21 nm Pitch dual-damascene BEOL process integration with full barrierless Ru metallization
Vega Gonzalez, Victor; Wilson, Chris; Paolillo, Sara; Decoster, Stefan; Mao, Ming; Versluijs, Janko; Blanco, Victor; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Lesniewska, Alicja; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Pardons, Katrien; Barla, Kathy; Tokei, Zsolt (2019) -
ALD barrier deposition on porous low-k dielectric materials for interconnects
Van Elshocht, Sven; Delabie, Annelies; Dewilde, Sven; Meersschaut, Johan; Swerts, Johan; Tielens, Hilde; Verdonck, Patrick; Witters, Thomas; Vancoille, Eric (2011-10) -
AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs
Kandaswamy, Prem Kumar; Liang, Hu; Zhao, Ming; Saripalli, Yoga; Porter Carlson, Eric; Thapa, Sarad Bahadur; Van Hove, Marleen; Richard, Olivier; De Vos, Brecht; Vancoille, Eric; Dutta, Barundeb (2014) -
Atomic layer deposition of Ru and RuO2 for MIMCAP applications
Zhao, Chao; Pawlak, Malgorzata; Popovici, Mihaela Ioana; Schaekers, Marc; Sleeckx, Erik; Vancoille, Eric; Wouters, Dirk; Tokei, Zsolt; Kittl, Jorge (2009) -
Atomic layer deposition of Ru and RuO2 for MIMCAP applications
Zhao, Chao; Pawlak, Malgorzata; Schaekers, Marc; Sleeckx, Erik; Vancoille, Eric; Wouters, Dirk; Tokei, Zsolt; Kittl, Jorge (2009) -
Combining TEM and 3D scanning spreading resistance microscopy, a hybrid approach, to the analysis of Ge gate-all-around nano-wires
Favia, Paola; Celano, Umberto; Drijbooms, Chris; Witters, Liesbeth; Arimura, Hiroaki; Capogreco, Elena; Vancoille, Eric; Bender, Hugo (2018) -
Evaluation of metallization options for advanced Cu interconnects application
Jourdan, Nicolas; Carbonell, Laure; Heylen, Nancy; Swerts, Johan; Armini, Silvia; Maestre Caro, Arantxa; Demuynck, Steven; Croes, Kristof; Beyer, Gerald; Tokei, Zsolt; Van Elshocht, Sven; Vancoille, Eric (2011) -
Growth and characterization of DH-HEMT structures with various AlGaN barriers and AlN interlayers on 200mm Si(111) substrates
Zhao, Ming; Saripalli, Yoga; Kandaswamy, Prem Kumar; Liang, Hu; Firrincieli, Andrea; Decoutere, Stefaan; Vancoille, Eric (2013) -
Growth and characterization of DH-HEMT structures with various AlGaN barriers and AlN interlayers on 200mm Si(111) substrates
Zhao, Ming; Saripalli, Yoga; Kandaswamy, Prem Kumar; Liang, Hu; Firrincieli, Andrea; Decoutere, Stefaan; Vancoille, Eric (2014) -
Growth techniques to reduce V-defect density in GaN and AlGaN layers grown on 200 mm Si (111) substrate
Liang, Hu; Saripalli, Yoga; Kandaswamy, Prem Kumar; Carlson, Eric Porter; Favia, Paola; Richard, Olivier; Bender, Hugo; Zhao, Ming; Thapa, Sarad Bahadur; Vancoille, Eric (2014) -
Heteroepitaxy of InP on Si(001) in sub-50nm width trenches by Selective-Area Metalorganic Vapor-Phase Epitaxy: the role of the nucleation layer and the recess engineering
Merckling, Clement; Waldron, Niamh; Jiang, Sijia; Guo, Weiming; Collaert, Nadine; Caymax, Matty; Vancoille, Eric; Barla, Kathy; Thean, Aaron; Heyns, Marc; Vandervorst, Wilfried (2014-01) -
Individual device analysis using hybrid TEM-scalpel SSRM metrology
Celano, Umberto; Favia, Paola; Drijbooms, Chris; Dixon-Luinenburg, Oberon; Richard, Olivier; Bender, Hugo; Vancoille, Eric; Paredis, Kristof; Loo, Roger; Schulze, Andreas; Hikavyy, Andriy; Witters, Liesbeth; Mitard, Jerome; Collaert, Nadine; Horiguchi, Naoto; Vandervorst, Wilfried (2017) -
Metal-organic chemical vapor deposition of Ti-doped NiO layers for application in resistive switching memories
Meersschaut, Johan; Toeller, Michael; Schaekers, Marc; Wang, Xin Peng; Brijs, Bert; Wouters, Dirk; Jurczak, Gosia; Altimime, Laith; Van Elshocht, Sven; Vancoille, Eric (2010) -
Nanobeam diffraction strain analysis of released Ge gate-all-around nano-wires: challenges and limitations
Favia, Paola; Witters, Liesbeth; Capogreco, Elena; Vancoille, Eric; Bender, Hugo (2018) -
On the Correlation Between Static and Low-Frequency Noise Parameters of Vertical Nanowire nMOSFETs
Simoen, Eddy; Vaisman Chasin, Adrian; Matagne, Philippe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Favia, Paola; Bender, Hugo; Vancoille, Eric; Horiguchi, Naoto; Veloso, Anabela (2020-05) -
On the correlation between static and low-frequency noise parameters of vertical nanowire nMOSFETs
Simoen, Eddy; Vaisman Chasin, Adrian; Matagne, Philippe; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Favia, Paola; Bender, Hugo; Vancoille, Eric; Veloso, Anabela (2020) -
Performance and electrostatic improvement by high-pressure anneal on Si-passivated strained Ge pFinFET and gate all around devices with superior NBTI reliability
Arimura, Hiroaki; Witters, Liesbeth; Cott, Daire; Dekkers, Harold; Loo, Roger; Mitard, Jerome; Ragnarsson, Lars-Ake; Wostyn, Kurt; Boccardi, Guillaume; Chiu, Eddie; Subirats, Alexandre; Favia, Paola; Vancoille, Eric; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2017) -
Plasma enhanced chemical vapor deposition of manganese on low-k dielectrics for copper diffusion barrier application
Jourdan, Nicolas; Barbarin, Yohan; Croes, Kristof; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt; Vancoille, Eric (2013) -
Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring
Halder, Sandip; Mols, Yves; Van Den Heuvel, Dieter; Van Puymbroeck, Jan; Caymax, Matty; Vancoille, Eric; Nieuborg, Nancy; Bast, Gerhard; Simpson, Gavin; Peikert, Milko; Polli, Marco; Ulea, Neli; Seong, Ho Yoo (2014) -
Proton formation and diffusion in amorphous SiNx:H
Dekkers, Harold; Prajapati, Victor; Van Elshocht, Sven; Vancoille, Eric (2011)