Evaluation of metallization options for advanced Cu interconnects application

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Authors
Jourdan, Nicolas; Carbonell, Laure; Heylen, Nancy; Swerts, Johan; Armini, Silvia; Maestre Caro, Arantxa; Demuynck, Steven; Croes, Kristof; Beyer, Gerald; Tokei, Zsolt; Van Elshocht, Sven; Vancoille, Eric
Conference
China Semiconductor Technology International Conference - CSTIC
Title
Evaluation of metallization options for advanced Cu interconnects application
Publication type
Proceedings paper
Embargo date
9999-12-31
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