Publication:

Evaluation of metallization options for advanced Cu interconnects application

Date

2011

Proceedings Paper

Simple item page Full metadata Statistics

Files

23618.pdf 510.98 KB

Author(s)

Jourdan, Nicolas

;

Carbonell, Laure

;

;

;

;

Maestre Caro, Arantxa

;

Demuynck, Steven

;

;

;

;

Van Elshocht, Sven

;

Vancoille, Eric

Statistics

1911 since deposited on 2021-10-19

1last month

Acq. date: 2026-05-18