Publication:

Evaluation of metallization options for advanced Cu interconnects application

Date

2011
Proceedings Paper
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Author(s)

Jourdan, Nicolas  
;
Carbonell, Laure
;
Heylen, Nancy  
;
Swerts, Johan  
;
Armini, Silvia  
;
Maestre Caro, Arantxa
;
Demuynck, Steven  
;
Croes, Kristof  
;
Beyer, Gerald  
;
Tokei, Zsolt  
;
Van Elshocht, Sven  
;
Vancoille, Eric  

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1910 since deposited on 2021-10-19
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