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Evaluation of metallization options for advanced Cu interconnects application
Publication:
Evaluation of metallization options for advanced Cu interconnects application
Date
2011
Proceedings Paper
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23618.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jourdan, Nicolas
;
Carbonell, Laure
;
Heylen, Nancy
;
Swerts, Johan
;
Armini, Silvia
;
Maestre Caro, Arantxa
;
Demuynck, Steven
;
Croes, Kristof
;
Beyer, Gerald
;
Tokei, Zsolt
;
Van Elshocht, Sven
;
Vancoille, Eric
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1903
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Metrics
Views
1903
since deposited on 2021-10-19
427
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations