Browsing by author "Vancoille, Eric"
Now showing items 21-31 of 31
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Selective metal-organic chemical vapor deposition growth of high quality GaAs on Si(001)
Guo, Weiming; Date, Lucien; Pena, Vanessa; Bao, X.; Merckling, Clement; Waldron, Niamh; Collaert, Nadine; Caymax, Matty; Sanchez, E.; Vancoille, Eric; Barla, Kathy; Thean, Aaron; Eyben, Pierre; Vandervorst, Wilfried (2014) -
Si-cap-free SiGe p-channel Fin FETS and gate-all-around transistors in a replacement metal gate Process: interface trap density reduction and performance improvement by high-pressure deuterium anneal
Mertens, Hans; Ritzenthaler, Romain; Arimura, Hiroaki; Franco, Jacopo; Sebaai, Farid; Hikavyy, Andriy; Pawlak, Bartek; Machkaoutsan, Vladimir; Devriendt, Katia; Tsvetanova, Diana; Milenin, Alexey; Witters, Liesbeth; Dangol, Anish; Vancoille, Eric; Bender, Hugo; Badaroglu, Mustafa; Holsteyns, Frank; Barla, Kathy; Mocuta, Dan; Horiguchi, Naoto; Thean, Aaron (2015) -
Strained germanium gate-all-around pMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
Witters, Liesbeth; Arimura, Hiroaki; Sebaai, Farid; Hikavyy, Andriy; Milenin, Alexey; Loo, Roger; De Keersgieter, An; Eneman, Geert; Schram, Tom; Wostyn, Kurt; Devriendt, Katia; Schulze, Andreas; Lieten, Ruben; Bilodeau, S; Cooper, E; Storck, Peter; Chiu, Eddy; Vrancken, Christa; Favia, Paola; Vancoille, Eric; Mitard, Jerome; Langer, Robert; Opdebeeck, Ann; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2017) -
Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
Witters, Liesbeth; Sebaai, Farid; Hikavyy, Andriy; Milenin, Alexey; Loo, Roger; De Keersgieter, An; Eneman, Geert; Schram, Tom; Wostyn, Kurt; Devriendt, Katia; Schulze, Andreas; Lieten, Ruben; Bilodeau, S; Cooper, E; Storck, Peter; Vrancken, Christa; Arimura, Hiroaki; Favia, Paola; Vancoille, Eric; Mitard, Jerome; Langer, Robert; Opdebeeck, Ann; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2017-06) -
Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese
Jourdan, Nicolas; Krishtab, Mikhail; Baklanov, Mikhaïl; Meersschaut, Johan; Wilson, Chris; Ablett, J.; Fonda, E.; Zhao, Larry; Van Elshocht, Sven; Tokei, Zsolt; Vancoille, Eric (2012) -
Supervia Process Integration and Reliability Compared to Stacked Vias Using Barrierless Ruthenium
Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Versluijs, Janko; Lesniewska, Alicja; Varela Pedreira, Olalla; Baert, Rogier; Paolillo, Sara; Decoster, Stefan; Schleicher, Filip; Montero Alvarez, Daniel; Bekaert, Joost; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Teugels, Lieve; Heylen, Nancy; Jourdan, Nicolas; El-Mekki, Zaid; van der Veen, Marleen; Ciofi, Ivan; Briggs, Basoene; Heijlen, Jeroen; Dupas, Luc; De Wachter, Bart; Vancoille, Eric; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Demonie, Ingrid; Lazzarino, Frederic; Ercken, Monique; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Jaysankar, Manoj; Wilson, Chris; Murdoch, Gayle; Tokei, Zsolt (2020) -
TEM investigation of gate-all-around nanowire devices
Favia, Paola; Arimura, Hiroaki; Capogreco, Elena; Eneman, Geert; Mertens, Hans; Hikavyy, Andriy; Richard, Olivier; Witters, Liesbeth; Kundu, Paromita; Loo, Roger; Vancoille, Eric; Bender, Hugo (2019) -
TEM investigations of gate-all-around nanowire devices
Favia, Paola; Richard, Olivier; Eneman, Geert; Mertens, Hans; Arimura, Hiroaki; Capogreco, Elena; Hikavyy, Andriy; Witters, Liesbeth; Kundu, Paromita; Loo, Roger; Vancoille, Eric; Bender, Hugo (2019) -
Three-layer BEOL process integration with supervia and self-aligned-block options for the 3nm node
Vega Gonzalez, Victor; Wilson, Chris; Briggs, Basoene; Decoster, Stefan; Versluijs, Janko; Lesniewska, Alicja; Paolillo, Sara; Baert, Rogier; Puliyalil, Harinarayanan; Bekaert, Joost; Kesters, Els; Le, Quoc Toan; Lorant, Christophe; Varela Pedreira, Olalla; Teugels, Lieve; Heylen, Nancy; El-Mekki, Zaid; van der Veen, Marleen; Webers, Tomas; Vats, Hemant; Rynders, Luc; Cupak, Miroslav; Lee, Jae Uk; Drissi, Youssef; Halipre, Luc; Charley, Anne-Laure; Verdonck, Patrick; Witters, Thomas; Van Gompel, Sander; Kimura, Yosuke; Jourdan, Nicolas; Ciofi, Ivan; Gupta, Anshul; Contino, Antonino; Boccardi, Guillaume; Lariviere, Stephane; Dupas, Luc; De Wachter, Bart; Vancoille, Eric; Lazzarino, Frederic; Ercken, Monique; Debacker, Peter; Kim, Ryan Ryoung han; Trivkovic, Darko; Croes, Kristof; Leray, Philippe; Dillemans, Leander; Chen, Yi-Fan; Tokei, Zsolt (2019) -
Tungsten planarization by gas cluster ion beam with CHF3
Everaert, Jean-Luc; Fernandez, Luis; Vos, Ingrid; Van Ammel, Annemie; Vrancken, Christa; Dekoster, Johan; Burke, Edd; Vancoille, Eric (2013) -
Vertical nanowire and nanosheet FETs: device features, novel schemes for improved process control and enhanced mobility, potential for faster & more energy efficient circuits
Veloso, Anabela; Eneman, Geert; Huynh-Bao, Trong; Vaisman Chasin, Adrian; Simoen, Eddy; Vecchio, Emma; Devriendt, Katia; Brus, Stephan; Rosseel, Erik; Hikavyy, Andriy; Loo, Roger; Paraschiv, Vasile; Chan, BT; Radisic, Dunja; Li, Waikin; Versluijs, Janko; Teugels, Lieve; Sebaai, Farid; Favia, Paola; Bender, Hugo; Vancoille, Eric; Scheerder, Jeroen; Fleischmann, Claudia; Horiguchi, Naoto; Matagne, Philippe (2019)