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Fabrication of superconducting resonators in a 300 mm pilot line for quantum technologies

dc.contributor.authorWan, Danny
dc.contributor.authorSwerts, Johan
dc.contributor.authorSouriau, Laurent
dc.contributor.authorBurnett, Jonathan
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorMongillo, Massimo
dc.contributor.authorVerjauw, Jeroen
dc.contributor.authorPotocnik, Anton
dc.contributor.authorThiam, Arame
dc.contributor.authorJussot, Julien
dc.contributor.authorVangoidsenhoven, Diziana
dc.contributor.authorPacco, Antoine
dc.contributor.authorKudra, Marina
dc.contributor.authorNiepce, David
dc.contributor.authorIvanov, Tsvetan
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorMocuta, Dan
dc.contributor.authorBylander, Jonas
dc.contributor.authorRadu, Iuliana
dc.date.accessioned2021-10-27T23:11:52Z
dc.date.available2021-10-27T23:11:52Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34417
dc.sourceIIOimport
dc.titleFabrication of superconducting resonators in a 300 mm pilot line for quantum technologies
dc.typeMeeting abstract
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorPiao, Xiaoyu
dc.contributor.imecauthorMongillo, Massimo
dc.contributor.imecauthorVerjauw, Jeroen
dc.contributor.imecauthorPotocnik, Anton
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorJussot, Julien
dc.contributor.imecauthorVangoidsenhoven, Diziana
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorIvanov, Tsvetan
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecMongillo, Massimo::0000-0002-6475-6320
dc.contributor.orcidimecVerjauw, Jeroen::0000-0002-4215-8688
dc.contributor.orcidimecPotocnik, Anton::0000-0002-0352-6388
dc.contributor.orcidimecJussot, Julien::0000-0002-2484-3462
dc.contributor.orcidimecIvanov, Tsvetan::0000-0003-3407-2742
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecSwerts, Johan::0000-0001-7547-7194
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.source.peerreviewyes
dc.source.beginpage10.2
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttps://iitc-conference.org/2019-iitc-mam-program/
imec.availabilityPublished - imec


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