Novel forksheet device architecture as ultimate logic scaling device towards 2nm

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Authors
Weckx, Pieter; Ryckaert, Julien; Dentoni Litta, Eugenio; Yakimets, Dmitry; Matagne, Philippe; Schuddinck, Pieter; Jang, Doyoung; Chehab, Bilal; Baert, Rogier; Gupta, Mohit; Oniki, Yusuke; Ragnarsson, Lars-Ake; Horiguchi, Naoto; Spessot, Alessio; Verkest, Diederik
Conference
IEEE Electron Devices Meeting - IEDM
Title
Novel forksheet device architecture as ultimate logic scaling device towards 2nm
Publication type
Proceedings paper
Embargo date
9999-12-31
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