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Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
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Authors
Westerveld, Wouter
;
Figeys, Bruno
;
Gao, Hang
;
Huang, Chih-Hsien
;
Verhaegen, Fabian
;
Troia, Benedetto
;
Haouari, Rachid
;
Neutens, Pieter
;
O'Callaghan, John
;
Lenci, Silvia
;
Rottenberg, Xavier
;
Jansen, Roelof
;
Rochus, Veronique
Conference
European Conference on Integrated Optics - ECIO
Title
Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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