Publication:
Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2107 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-02-24
Citations
Statistics
Views
2107 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-02-24
Citations