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Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology

dc.contributor.authorWesterveld, Wouter
dc.contributor.authorFigeys, Bruno
dc.contributor.authorGao, Hang
dc.contributor.authorHuang, Chih-Hsien
dc.contributor.authorVerhaegen, Fabian
dc.contributor.authorTroia, Benedetto
dc.contributor.authorHaouari, Rachid
dc.contributor.authorNeutens, Pieter
dc.contributor.authorO'Callaghan, John
dc.contributor.authorLenci, Silvia
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-27T23:25:17Z
dc.date.available2021-10-27T23:25:17Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34434
dc.sourceIIOimport
dc.titleMicro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
dc.typeProceedings paper
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecHaouari, Rachid::0000-0003-4809-2023
dc.contributor.orcidimecO'Callaghan, John::0000-0003-2313-8697
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage3
dc.source.conferenceEuropean Conference on Integrated Optics - ECIO
dc.source.conferencedate24/04/2019
dc.source.conferencelocationGhent Belgium
imec.availabilityPublished - imec


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