dc.contributor.author | Westerveld, Wouter | |
dc.contributor.author | Leinders, Suzanne | |
dc.contributor.author | van Neer, Paul | |
dc.contributor.author | Urbach, Paul | |
dc.contributor.author | de Jong, Nico | |
dc.contributor.author | Verweij, Martin | |
dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Rochus, Veronique | |
dc.date.accessioned | 2021-10-27T23:26:46Z | |
dc.date.available | 2021-10-27T23:26:46Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34436 | |
dc.source | IIOimport | |
dc.title | Optical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Westerveld, Wouter | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Rochus, Veronique | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1 | |
dc.source.endpage | 7 | |
dc.source.conference | 20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems | |
dc.source.conferencedate | 24/03/2019 | |
dc.source.conferencelocation | Hannover Germany | |
dc.identifier.url | https://ieeexplore.ieee.org/document/8724528 | |
imec.availability | Published - open access | |