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Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25

dc.contributor.authorWostyn, Kurt
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorConard, Thierry
dc.contributor.authorRondas, Dirk
dc.contributor.authorLoo, Roger
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-27T23:36:39Z
dc.date.available2021-10-27T23:36:39Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34450
dc.sourceIIOimport
dc.titleImpact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25
dc.typeMeeting abstract
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRondas, Dirk
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.beginpage114
dc.source.endpage115
dc.source.conferenceInternational Si Technology and Device Meeting / Int. Conf. on Si epitaxy and Heterostructures - 2nd Joint ISTDM / ICSI 2019 Con
dc.source.conferencedate2/06/2019
dc.source.conferencelocationMadison, WI USA
imec.availabilityPublished - imec


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