Publication:

Optimization of an advanced positive DUV photoresist towards 150 nm and beyond

Date

1999

Presentation

Simple item page Full metadata Statistics

Files

3412.pdf 808.72 KB

Author(s)

Ercken, Monique

;

Moelants, Myriam

;

Vandenberghe, Geert

;

Goethals, Mieke

;

;

;

;

Statistics

1975 since deposited on 2021-10-06

Acq. date: 2026-02-24