Publication:
Analysis of Leakage Mechanisms in AlN Nucleation Layers on p-Si and p-SOI Substrates
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1892 since deposited on 2021-10-28
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Acq. date: 2026-08-08
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Statistics
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1892 since deposited on 2021-10-28
2last month
1last week
Acq. date: 2026-08-08
Citations