Self-assembled monolayers as ALD Ru growth inhibitor in an area-selective bottom-up metallization scheme

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Authors
Zyulkov, Ivan; Madhiwala, Viraj; De Gendt, Stefan; Armini, Silvia
Conference
ASD workshop
Title
Self-assembled monolayers as ALD Ru growth inhibitor in an area-selective bottom-up metallization scheme
Publication type
Meeting abstract
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