Show simple item record

Understanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes

dc.contributor.authorZyulkov, Ivan
dc.contributor.authorVoronina, Ekaterina
dc.contributor.authorChan, BT
dc.contributor.authorRakhimova, Tatyana
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-28T01:01:45Z
dc.date.available2021-10-28T01:01:45Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34561
dc.sourceIIOimport
dc.titleUnderstanding the interaction mechanisms between amorphous carbon sacrificial patterning material and H2 plasma to enable area-selective ALD processes
dc.typeMeeting abstract
dc.contributor.imecauthorZyulkov, Ivan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.conferencePESM2019
dc.source.conferencedate20/05/2019
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record