Modelling calibration and validation of contributions to stress in the STI process sequence

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Authors
Garikipati, K.; Rao, V. S.; Hao, M. Y.; Ibok, E.; De Wolf, Ingrid; Dutton, R. W.
Conference
2nd International Modeling and Simulations of Microsystems Conference
Title
Modelling calibration and validation of contributions to stress in the STI process sequence
Publication type
Proceedings paper
Embargo date
9999-12-31
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