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Modelling calibration and validation of contributions to stress in the STI process sequence

dc.contributor.authorGarikipati, K.
dc.contributor.authorRao, V. S.
dc.contributor.authorHao, M. Y.
dc.contributor.authorIbok, E.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDutton, R. W.
dc.date.accessioned2021-10-06T11:11:50Z
dc.date.available2021-10-06T11:11:50Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3462
dc.sourceIIOimport
dc.titleModelling calibration and validation of contributions to stress in the STI process sequence
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage180
dc.source.endpage183
dc.source.conference2nd International Modeling and Simulations of Microsystems Conference
dc.source.conferencedate19/04/1999
dc.source.conferencelocationPuerto Rico
imec.availabilityPublished - open access


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