Authors

Gillot, Christophe; De Backer, E.; Grillaert, Joost; Heylen, Nancy; Vaca, L. M.; Blavier, G.

Conference

4th International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC

Title

Impact of dummy metal structures on post oxide CMP planarization

Publication type

Proceedings paper

Embargo date

9999-12-31