Interconnect Design-Technology Co-Optimization for Sub-3nm Technology Nodes

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Authors
Baert, Rogier; Ciofi, Ivan; Patli, Sudhir; Zografos, Odysseas; Sarkar, Satadru; Chehab, Bilal; Jang, Doyoung; Spessot, Alessio; Ryckaert, Julien; Tokei, Zsolt
Conference
23rd IEEE International Interconnect Technology Conference - IITC 2020
Title
Interconnect Design-Technology Co-Optimization for Sub-3nm Technology Nodes
Publication type
Proceedings paper
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