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Interconnect Design-Technology Co-Optimization for Sub-3nm Technology Nodes

dc.contributor.authorBaert, Rogier
dc.contributor.authorCiofi, Ivan
dc.contributor.authorPatli, Sudhir
dc.contributor.authorZografos, Odysseas
dc.contributor.authorSarkar, Satadru
dc.contributor.authorChehab, Bilal
dc.contributor.authorJang, Doyoung
dc.contributor.authorSpessot, Alessio
dc.contributor.authorRyckaert, Julien
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-28T20:12:24Z
dc.date.available2021-10-28T20:12:24Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34670
dc.sourceIIOimport
dc.titleInterconnect Design-Technology Co-Optimization for Sub-3nm Technology Nodes
dc.typeProceedings paper
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorPatli, Sudhir
dc.contributor.imecauthorZografos, Odysseas
dc.contributor.imecauthorSarkar, Satadru
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecZografos, Odysseas::0000-0002-9998-8009
dc.source.peerreviewyes
dc.source.beginpage28
dc.source.endpage30
dc.source.conference23rd IEEE International Interconnect Technology Conference - IITC 2020
dc.source.conferencedate1/06/2020
dc.source.conferencelocationSan Jose, CA (online) USA
imec.availabilityPublished - imec


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